Abstract
We have studied the improvement of electron emission by diamond-like carbon (DLC) coating on Mo field emitter arrays by a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55 V to 30 V by 20 nm DLC coating and maximum emission current was increased from 166 μA to 831 μA. Also the gate voltage required to get the anode current of 0.1(μA/emitter) decreases from 77 V to 48 V. Furthermore, the emission current from DLC coated Mo FEAs is more stable than that of non-coated Mo FEAs.
Original language | English |
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Pages | 149-152 |
Number of pages | 4 |
Publication status | Published - 1997 |
Externally published | Yes |
Event | Proceedings of the 1997 4th Asian Symposium on Information Display - Hong Kong, Hong Kong Duration: 1997 Feb 13 → 1997 Feb 14 |
Other
Other | Proceedings of the 1997 4th Asian Symposium on Information Display |
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City | Hong Kong, Hong Kong |
Period | 97/2/13 → 97/2/14 |
ASJC Scopus subject areas
- Engineering(all)