TY - JOUR
T1 - Improvement of photon extraction efficiency of gan-based led using micro and nano complex polymer structures
AU - Cho, Joong Yeon
AU - Byeon, Kyeong Jae
AU - Park, Hyoungwon
AU - Kim, Jinseung
AU - Kim, Hyeong Seok
AU - Lee, Heon
N1 - Funding Information:
This work was supported by the Nano Research and Development program through the Korea Science and Engineering Foundation funded by the Ministry of Education, Science and Technology (2010-0019152).
PY - 2011
Y1 - 2011
N2 - A micro- and nanoscale complex structure made of a high refractive index polymer (n = 2.08) was formed on the ITO electrode layer of an edge-emitting type GaN blue light-emitting diode (LED), in order to improve the photon extraction efficiency by suppressing total internal reflection of photons. The nanoimprint lithography process was used to form the micro- and nanoscale complex structures, using a polymer resin with dispersed TiO2 nanoparticles as an imprint resin. Plasma processing, such as reactive ion etching, was used to form the micro- and nano-scale complex structure; thus, plasma-induced damage to the LED device can be avoided. Due to the high refractive index polymeric micro- and nanostructure on the ITO layer, the electroluminescence emission was increased up to 20%, compared to an identical LED that was grown on a patterned sapphire substrate to improve photon extraction efficiency.
AB - A micro- and nanoscale complex structure made of a high refractive index polymer (n = 2.08) was formed on the ITO electrode layer of an edge-emitting type GaN blue light-emitting diode (LED), in order to improve the photon extraction efficiency by suppressing total internal reflection of photons. The nanoimprint lithography process was used to form the micro- and nanoscale complex structures, using a polymer resin with dispersed TiO2 nanoparticles as an imprint resin. Plasma processing, such as reactive ion etching, was used to form the micro- and nano-scale complex structure; thus, plasma-induced damage to the LED device can be avoided. Due to the high refractive index polymeric micro- and nanostructure on the ITO layer, the electroluminescence emission was increased up to 20%, compared to an identical LED that was grown on a patterned sapphire substrate to improve photon extraction efficiency.
UR - http://www.scopus.com/inward/record.url?scp=84862908276&partnerID=8YFLogxK
U2 - 10.1186/1556-276X-6-578
DO - 10.1186/1556-276X-6-578
M3 - Article
C2 - 22040200
AN - SCOPUS:84862908276
SN - 1931-7573
VL - 6
SP - 1
EP - 6
JO - Nanoscale Research Letters
JF - Nanoscale Research Letters
M1 - 578
ER -