Improvement of solar cell efficiency by applying Si3N 4 nanopattern on glass substrate

Yang Doo Kim, Ju Hyeon Shin, Kyeong Suk Oh, Jeong Chul Lee, Heon Lee

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


A cylindrical Si3N4 nanopattern whose heights was 200 nm was fabricated on a glass substrate, and an aluminum-doped zinc oxide (AZO) layer was grown on the nanopatterned glass substrate. The nanopattern was applied to an amorphous silicon solar cell in order to increase the light-scattering effect, thus enhancing the efficiency of the solar cell. The reflectance of the solar cell on the Si3N4 nanopattern decreased and its absorption increased. Compared to a flat substrate, the short-circuit current density (Jsc) and conversion efficiency of a solar cell on the Si3N4 nanopatterned substrate were improved by 17.9% and 24.2%, respectively, as determined from solar simulator measurements.

Original languageEnglish
Pages (from-to)1240-1244
Number of pages5
JournalCurrent Applied Physics
Issue number9
Publication statusPublished - 2014 Sept

Bibliographical note

Funding Information:
This research was supported by the R&D program for Industrial Core Technology through the Korea Evaluation Institute of Industrial Technology supported by the Ministry of Knowledge Economy in Korea (Grant No. 10040225 ) and by the Pioneer Research Center Program through the National Research Foundation of Korea funded by the Ministry of Science, ICT & Future Planning ( NRF-2013M3C1A3063597 ).


  • Amorphous silicon solar cell
  • Light scattering effect
  • Nanoimprint lithography
  • Planarization

ASJC Scopus subject areas

  • General Materials Science
  • General Physics and Astronomy


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