Improvement of the mass sensitivity in flexural plate wave biosensor based on PZT thin film

Yong Seon Lee, Dae Sung Yoon, Tae Song Kim

Research output: Contribution to journalConference articlepeer-review

9 Citations (Scopus)


This paper presents the fabrication and characterization of microfabricated FPW device based on the piezoelectric PZT (Zr/Ti = 52/48) thin films for biological sensor applications. And we investigated the improvement of mass sensitivity in the FPW devices by etching the PZT on the delay-line. For biosensor application, when we bind bio-molecules directly on the delay-line to the device, the mass of the sensing plate is increased and a decrease in wave velocity, or resonant frequency, of the device is observed. The sensitivity of flexural plate wave device is nano gram level in milliliter by measuring resonant frequency shift. This is characterized by Au deposition method which has the mass loading effect similar to adsorption of protein. In the case of biotin-streptavidin binding, the device shows the good frequency response to streptavidin addition on the biotin coated Au of membrane. The FITC (Fluorescein Isothiocyanate) is labeled on streptavidin to check the binding between biotin and streptavidin. This is verified by using a fluorescent microscopy.

Original languageEnglish
Pages (from-to)391-400
Number of pages10
JournalIntegrated Ferroelectrics
Publication statusPublished - 2005
Externally publishedYes
Event16th International Symposium on Integrated Ferroelectrics, ISIF-16 - Gyeongju, Korea, Republic of
Duration: 2004 Apr 52004 Apr 8

Bibliographical note

Funding Information:
This research, under the contract project code MS-01-133-01, has been supported by the Intelligent Microsystem Center, which carries out one of the 21st century’s Frontier R&D Projects sponsored by the Korea Ministry of Science & Technology.


  • Biosensor
  • FPW
  • MEMS
  • PZT
  • Piezoelectric
  • Sensitivity

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry


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