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In situ annealing of III1-xMnxV ferromagnetic semiconductors

  • Xinyu Liu
  • , Seul Ki Bac
  • , Pitambar Sapkota
  • , Cameron Gorsak
  • , Xiang Li
  • , Sining Dong
  • , Sanghoon Lee
  • , Sylwia Ptasinska
  • , Jacek K. Furdyna
  • , Margaret Dobrowolska

    Research output: Contribution to journalArticlepeer-review

    Abstract

    A systematic study of low temperature (LT) annealing III1-xMnxV of (Ga1-xMnxAs and Ga1-xMnxAs1-yPy) thin films in situ with different capping layers (Se, Te, or As) was carried out without exposure to the atmosphere. Experimental results show that a correct in situ annealing approach can lead to significant increases of the Curie temperature, carrier concentration, and magnetic moment, similar to the ex situ LT-annealing experiments achieved in earlier studies. Moreover, this approach allowed us to successfully deposit high-quality semiconductor layers on top of such in situ annealed films, demonstrating great potential for designing high quality III1-xMnxV-based multilayers for spintronic applications optimized by the benefits of the LT-annealing.

    Original languageEnglish
    Article number02D102
    JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
    Volume36
    Issue number2
    DOIs
    Publication statusPublished - 2018 Mar 1

    Bibliographical note

    Funding Information:
    This work was supported by the NSF Grant No. DMR14-00432, Basic Science Research Program through the NRF of Korea funded by the Ministry of Education (No. 2015R1D1A1A01056614), and a grant from Korea University. P.S. and S.P. acknowledge the U.S. Department of Energy Office of Science, Office of Basic Energy Sciences, under the Award No. DE-FC02-04ER15533 (No. NDRL No. 5200).

    Publisher Copyright:
    © 2018 Author(s).

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Instrumentation
    • Process Chemistry and Technology
    • Surfaces, Coatings and Films
    • Electrical and Electronic Engineering
    • Materials Chemistry

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