@inproceedings{81d415884f9b4d71aa51ed5d407b0e4e,
title = "Incorporation of hydroxyl ions and protons in oxide ion vacancies in nanoscale yttria stabilized zirconia during atomic layer deposition",
abstract = "This work provides a direct evidence that protons are incorporated in yttria stabilized zirconia (YSZ) deposited by atomic layer deposition (ALD) during fabrication of films not from ambient water after deposition. Oxydant made of proton isotopes or deutrium is used as a tracer of proton incorporation during the synthesis and the time-of-flight secondary mass ion mass spectrometry (TOF-SIMS) has been condcuted to conduct depth profiling. As a result, we have identified that protons or deutrium ions introduced during deposition truly favor to reside in the ALD YSZ layers and that concentration of protons incorporated during ALD is related to concentration of yttrium.",
author = "Son, {Kyung Sik} and Bae, {Min Young} and Kiho Bae and Ha, {Jeong Sook} and Shim, {Joon Hyung}",
year = "2012",
doi = "10.1149/1.3701304",
language = "English",
isbn = "9781566779531",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "1",
pages = "155--160",
booktitle = "Ionic and Mixed Conducting Ceramics 8",
edition = "1",
note = "Ionic and Mixed Conducting Ceramics 8 - 221st ECS Meeting ; Conference date: 06-05-2012 Through 10-05-2012",
}