Inductively coupled plasma etching of nano-patterned sapphire for flip-chip GaN light emitting diode applications

  • Byung Jae Kim
  • , Michael A. Mastro
  • , Hyunjung Jung
  • , Hong Yeol Kim
  • , Sung Hyun Kim
  • , Ron T. Holm
  • , Jennifer Hite
  • , Charles R. Eddy
  • , Joona Bang*
  • , Jihyun Kim
  • *Corresponding author for this work

    Research output: Contribution to journalLetterpeer-review

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