Inductively coupled plasma etching of nano-patterned sapphire for flip-chip GaN light emitting diode applications
- Byung Jae Kim
- , Michael A. Mastro
- , Hyunjung Jung
- , Hong Yeol Kim
- , Sung Hyun Kim
- , Ron T. Holm
- , Jennifer Hite
- , Charles R. Eddy
- , Joona Bang*
- , Jihyun Kim
*Corresponding author for this work
Research output: Contribution to journal › Letter › peer-review
23
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