@inproceedings{fdae1d3948fe4a649884e5586c5841e6,
title = "Influence of etching slope on two-dimensional photonic crystal slab resonators",
abstract = "The influence of etching slope on cavity Q-factors in two-dimensional (2D) photonic crystal (PhC) slab is studied. Through FDTD simulation, it is confirmed that the Q-factor decreases with etching slope. The main loss comes from the horizontal coupling into propagating TM-modes. We designed three-lattice-long modified linear cavities having high Q-factors. However, the measured Q-factor was about 250. This small Q-factor is attributed to the non-vertical (13°) side wall.",
keywords = "Etching slope, Nanocavity, Photonic crystal, Q-factor",
author = "Kim, {Myung Ki} and Hwang, {In Kag} and Yang, {Jin Kyu} and Lee, {Yong Hee}",
year = "2006",
doi = "10.1117/12.688885",
language = "English",
isbn = "0819464473",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Optoelectronic Materials and Devices",
note = "Optoelectronic Materials and Devices ; Conference date: 05-09-2006 Through 07-09-2006",
}