Influence of High-Energy Proton Irradiation on β-Ga2O3 Nanobelt Field-Effect Transistors

Gwangseok Yang, Soohwan Jang, Fan Ren, Stephen J. Pearton, Jihyun Kim

Research output: Contribution to journalArticlepeer-review

107 Citations (Scopus)


The robust radiation resistance of wide-band gap materials is advantageous for space applications, where the high-energy particle irradiation deteriorates the performance of electronic devices. We report on the effects of proton irradiation of β-Ga2O3 nanobelts, whose energy band gap is ∼4.85 eV at room temperature. Back-gated field-effect transistor (FET) based on exfoliated quasi-two-dimensional β-Ga2O3 nanobelts were exposed to a 10 MeV proton beam. The proton-dose- and time-dependent characteristics of the radiation-damaged FETs were systematically analyzed. A 73% decrease in the field-effect mobility and a positive shift of the threshold voltage were observed after proton irradiation at a fluence of 2 × 1015 cm-2. Greater radiation-induced degradation occurs in the conductive channel of the β-Ga2O3 nanobelt than at the contact between the metal and β-Ga2O3. The on/off ratio of the exfoliated β-Ga2O3 FETs was maintained even after proton doses up to 2 × 1015 cm-2. The radiation-induced damage in the β-Ga2O3-based FETs was significantly recovered after rapid thermal annealing at 500 °C. The outstanding radiation durability of β-Ga2O3 renders it a promising building block for space applications.

Original languageEnglish
Pages (from-to)40471-40476
Number of pages6
JournalACS Applied Materials and Interfaces
Issue number46
Publication statusPublished - 2017 Nov 22

Bibliographical note

Funding Information:
This research was supported by the Korea Institute of Energy Technology Evaluation and Planning (KETEP), the Ministry of Trade, Industry, and Energy (MOTIE) of Korea (No. 20172010104830), and the Space Core Technology Development Program (2017M1A3A3A02015033) through the National Research Foundation of Korea funded by the Ministry of Science, ICT and Future Planning of Korea. The work at UF was sponsored by the Department of the Defense, Defense Threat Reduction Agency, HDTRA1-17-1-011, monitored by Jacob Calkins.

Publisher Copyright:
© 2017 American Chemical Society.


  • gallium oxide
  • proton irradiation
  • thermal annealing
  • two-dimensional materials
  • wide-band gap semiconductors

ASJC Scopus subject areas

  • General Materials Science


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