Influence of laser damage on the performance of selective emitter solar cell fabricated using laser doping process

Myungsu Kim, Donghwan Kim, Dongseop Kim, Yoonmook Kang

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)


This article investigates the impact of laser damage on the performance of a selective emitter solar cell fabricated using a laser doping process (LD). After the optimization of the laser doping process, an amorphous silicon layer with a thickness of approximately 100 Å was observed on the laser-doped emitter. The amorphous laser damage decreased the power conversion efficiency due to poor contact between the Ag front electrode and the selective emitter. To effectively improve the quality of the front contacts, a solution etch-back process was applied after the laser doping step (LEB), and the series resistance of the selective emitter solar cell was restored to 0.55 Ω cm2 from around 1.0 Ω cm2. The contact formation during the LEB process clearly improved, and it was verified by comparing the densities of the Ag crystallites after Ag electrode removal from the LEB cell and the LD cell. The improvement in the formation of the front contact resulted in the LEB selective emitter solar cell recording a maximum 19.16% of power conversion efficiency, with a standard deviation of 0.055.

Original languageEnglish
Pages (from-to)215-220
Number of pages6
JournalSolar Energy Materials and Solar Cells
Publication statusPublished - 2015 Jan

Bibliographical note

Funding Information:
This work was supported by a grant of the National Research Foundation of Korea funded by the Korean Government (MSIP) (2014, University-Institute Cooperation Program) and by a grant from the Human Resources Development program (No. 20124030200120 ) of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) funded by the Ministry of Trade, Industry and Energy, Korea .


  • Etch back
  • Laser damage
  • Laser doping
  • Selective emitter

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films


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