Influence of post-annealing on the electrical properties of metal/oxide/silicon nitride/oxide/silicon capacitors for flash memories

Hee Dong Kim, Ho Myoung An, Kyoung Chan Kim, Yu Jeong Seo, Tae Geun Kim

    Research output: Contribution to journalArticlepeer-review

    3 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Influence of post-annealing on the electrical properties of metal/oxide/silicon nitride/oxide/silicon capacitors for flash memories'. Together they form a unique fingerprint.

    Keyphrases

    Material Science