The change of microstructure of ITO films with deposition condition combination was studied. The initial stage of double-layer ITO films effectively determined the microstructure and the preferred orientation of the total film. By comparing double- and single-layer ITO films, the electrical properties did not change regardless of the type of microstructure, domain, or grain structure.
|Number of pages
|Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
|Published - 2003 Jan
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering