Abstract
In this study, the authors investigate the influence of thermal stress on the heat-generating performance of indium tin oxide (ITO) nanoparticle (NP) thin films on quartz substrates. ITO NP thin films experience repeated thermal stresses during their electrical heating cycles. As the number of the heating cycles increases to 50, the highest temperature of the ITO NP thin film decreases from 317 to 221 °C. Our analysis of the temperature profiles, morphological images, and electrical resistance reveals that the degradation in the heat-generating performance is closely correlated with microcracks in the oxide thin film caused by thermal stresses.
| Original language | English |
|---|---|
| Article number | 06KA02 |
| Journal | Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics |
| Volume | 34 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 2016 Nov 1 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
- Materials Chemistry