Infrared thermal velocimetry for nonintrusive flow measurement in silicon microfluidic devices

Jaewon Chung; Costas P. Grigoropoulos; Ralph Greif

doi:10.1063/1.1569397

Infrared thermal velocimetry for nonintrusive flow measurement in silicon microfluidic devices

Jaewon Chung, Costas P. Grigoropoulos, Ralph Greif

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

The performance of microelectromechanical system (MEMS) based fluidic devices was investigated by using the method of infrared thermal velocimetry (ITV). The thermal image obtained from the infrared laser heating of the fluid flowing in a silicon microchannel was recorded for determining the average flow velocity. The ITV method can be used to characterize wide range of channel velocities with an accuracy of ±10%.

Original language	English
Pages (from-to)	2911-2917
Number of pages	7
Journal	Review of Scientific Instruments
Volume	74
Issue number	5
DOIs	https://doi.org/10.1063/1.1569397
Publication status	Published - 2003 May
Externally published	Yes

ASJC Scopus subject areas

Instrumentation

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10.1063/1.1569397

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title = "Infrared thermal velocimetry for nonintrusive flow measurement in silicon microfluidic devices",

abstract = "The performance of microelectromechanical system (MEMS) based fluidic devices was investigated by using the method of infrared thermal velocimetry (ITV). The thermal image obtained from the infrared laser heating of the fluid flowing in a silicon microchannel was recorded for determining the average flow velocity. The ITV method can be used to characterize wide range of channel velocities with an accuracy of ±10%.",

author = "Jaewon Chung and Grigoropoulos, {Costas P.} and Ralph Greif",

year = "2003",

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AU - Grigoropoulos, Costas P.

AU - Greif, Ralph

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N2 - The performance of microelectromechanical system (MEMS) based fluidic devices was investigated by using the method of infrared thermal velocimetry (ITV). The thermal image obtained from the infrared laser heating of the fluid flowing in a silicon microchannel was recorded for determining the average flow velocity. The ITV method can be used to characterize wide range of channel velocities with an accuracy of ±10%.

AB - The performance of microelectromechanical system (MEMS) based fluidic devices was investigated by using the method of infrared thermal velocimetry (ITV). The thermal image obtained from the infrared laser heating of the fluid flowing in a silicon microchannel was recorded for determining the average flow velocity. The ITV method can be used to characterize wide range of channel velocities with an accuracy of ±10%.

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DO - 10.1063/1.1569397

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JO - Review of Scientific Instruments

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Infrared thermal velocimetry for nonintrusive flow measurement in silicon microfluidic devices

Abstract

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