Infrared vision using uncooled micro-optomechanical camera

T. Perazzo, M. Mao, O. Kwon, A. Majumdar, J. B. Varesi, P. Norton

Research output: Contribution to journalArticlepeer-review

91 Citations (Scopus)


The fabrication, design, and imaging results of an uncooled infrared (IR) camera that contains a focal plane array of bimaterial microcantilever sensors, and an optical readout method that measures cantilever deflections in the nanometer range to directly project a visible image of the IR scene on the human eye or a visible camera are presented. The results suggests that objects at temperatures as low as 100 °C can be imaged with the best noise-equivalent temperature difference (NEΔT) in the range of 10 K. It is estimated that further improvements that are currently being pursued can improve NEΔT to about 50 mK.

Original languageEnglish
Pages (from-to)3567-3569
Number of pages3
JournalApplied Physics Letters
Issue number23
Publication statusPublished - 1999 Jun 7
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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