Infrared vision using uncooled micro-optomechanical camera

T. Perazzo; M. Mao; O. Kwon; A. Majumdar; J. B. Varesi; P. Norton

doi:10.1063/1.124163

Infrared vision using uncooled micro-optomechanical camera

T. Perazzo, M. Mao, O. Kwon, A. Majumdar, J. B. Varesi, P. Norton

Research output: Contribution to journal › Article › peer-review

91 Citations (Scopus)

Abstract

The fabrication, design, and imaging results of an uncooled infrared (IR) camera that contains a focal plane array of bimaterial microcantilever sensors, and an optical readout method that measures cantilever deflections in the nanometer range to directly project a visible image of the IR scene on the human eye or a visible camera are presented. The results suggests that objects at temperatures as low as 100 °C can be imaged with the best noise-equivalent temperature difference (NEΔT) in the range of 10 K. It is estimated that further improvements that are currently being pursued can improve NEΔT to about 50 mK.

Original language	English
Pages (from-to)	3567-3569
Number of pages	3
Journal	Applied Physics Letters
Volume	74
Issue number	23
DOIs	https://doi.org/10.1063/1.124163
Publication status	Published - 1999 Jun 7
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.124163

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@article{fe879b07ecc24a95a13e9ccd16aa67c1,

title = "Infrared vision using uncooled micro-optomechanical camera",

abstract = "The fabrication, design, and imaging results of an uncooled infrared (IR) camera that contains a focal plane array of bimaterial microcantilever sensors, and an optical readout method that measures cantilever deflections in the nanometer range to directly project a visible image of the IR scene on the human eye or a visible camera are presented. The results suggests that objects at temperatures as low as 100 °C can be imaged with the best noise-equivalent temperature difference (NEΔT) in the range of 10 K. It is estimated that further improvements that are currently being pursued can improve NEΔT to about 50 mK.",

author = "T. Perazzo and M. Mao and O. Kwon and A. Majumdar and Varesi, {J. B.} and P. Norton",

year = "1999",

month = jun,

day = "7",

doi = "10.1063/1.124163",

language = "English",

volume = "74",

pages = "3567--3569",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "23",

}

TY - JOUR

T1 - Infrared vision using uncooled micro-optomechanical camera

AU - Perazzo, T.

AU - Mao, M.

AU - Kwon, O.

AU - Majumdar, A.

AU - Varesi, J. B.

AU - Norton, P.

PY - 1999/6/7

Y1 - 1999/6/7

N2 - The fabrication, design, and imaging results of an uncooled infrared (IR) camera that contains a focal plane array of bimaterial microcantilever sensors, and an optical readout method that measures cantilever deflections in the nanometer range to directly project a visible image of the IR scene on the human eye or a visible camera are presented. The results suggests that objects at temperatures as low as 100 °C can be imaged with the best noise-equivalent temperature difference (NEΔT) in the range of 10 K. It is estimated that further improvements that are currently being pursued can improve NEΔT to about 50 mK.

AB - The fabrication, design, and imaging results of an uncooled infrared (IR) camera that contains a focal plane array of bimaterial microcantilever sensors, and an optical readout method that measures cantilever deflections in the nanometer range to directly project a visible image of the IR scene on the human eye or a visible camera are presented. The results suggests that objects at temperatures as low as 100 °C can be imaged with the best noise-equivalent temperature difference (NEΔT) in the range of 10 K. It is estimated that further improvements that are currently being pursued can improve NEΔT to about 50 mK.

UR - http://www.scopus.com/inward/record.url?scp=0032614109&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032614109&partnerID=8YFLogxK

U2 - 10.1063/1.124163

DO - 10.1063/1.124163

M3 - Article

AN - SCOPUS:0032614109

SN - 0003-6951

VL - 74

SP - 3567

EP - 3569

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 23

ER -

Infrared vision using uncooled micro-optomechanical camera

Abstract

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