Integrated planar spiral inductors with CoFe and NiFe ferromagnetic layer

Gyoungbum Kim, Seung Yong Cha, Eun Kyung Hyun, Youngchai Jung, Yoonsuk Choi, Jae Sung Rieh, Seong Rae Lee, Sungwoo Hwang

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)


Inductance increase up to 28% was obtained for on-chip spiral inductors by employing DC-sputtered CoFe and NiFe ferromagnetic (FM) layer on top of the spirals. It was also observed that slitpatterned FM layers exhibited better quality factors than blanket FM layers, leading to values comparable to that of the inductors without FM layer.

Original languageEnglish
Pages (from-to)676-678
Number of pages3
JournalMicrowave and Optical Technology Letters
Issue number3
Publication statusPublished - 2008 Mar


  • Ferromagnetic materials
  • Ferromagnetic spiral inductor
  • Inductance
  • Quality factor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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