Interlocking electrodes fabricated by RF magnetron sputtering for lithium thin film batteries

Interlocking electrodes were fabricated by RF magnetron sputtering technique to enhance electrochemical behaviors. Current collecting materials with rod-like shapes were arrayed along the substrate foils by using glancing angle deposition and subsequently active materials reacted toward lithium ions were deposited onto the arrayed current collectors with thermal treatment to form interlocking structures. It is expected that applied to lithium thin film batteries, the electrodes could relieve stress of volume changes in active materials as well as reduce diffusion distance of the lithium ions which is the slowest process for electrochemical reactions in the cell.