Abstract
We report on the anisotropic carrier transport properties of semipolar (11 2 ̄ 2) GaN films with low defect density. We utilized the asymmetric lateral epitaxy to obtain various semipolar (11 2 ̄ 2) GaN films having significantly reduced partial dislocations and basal-plane stacking faults (BPSFs). The directionally dependent carrier transport was observed with the lower sheet resistances (Rsh) along the [1 1 ̄ 00] direction. The Rsh ratios of semipolar (11 2 ̄ 2) GaN films were found to be relatively smaller than those of nonpolar a-plane GaN films, possibly due to low BPSF density and the reduced in-plane electric field induced by BPSF along the [11 2 ̄ 3] direction at wurtzite domain boundaries.
Original language | English |
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Article number | 162103 |
Journal | Applied Physics Letters |
Volume | 103 |
Issue number | 16 |
DOIs | |
Publication status | Published - 2013 Oct 14 |
Bibliographical note
Funding Information:The authors would like to thank Dr. Y. G. Seo at the Korea Electronics Technology Institute for X-ray diffraction measurements and helpful discussions. This work was supported by 2013 Hongik University Research Fund.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)