Investigation of carrier transport properties in semipolar (11 2 ̄ 2) GaN films with low defect density

Soohwan Jang, Hyonwoong Kim, Doo Soo Kim, Sung Min Hwang, Jihyun Kim, Kwang Hyeon Baik

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    16 Citations (Scopus)

    Abstract

    We report on the anisotropic carrier transport properties of semipolar (11 2 ̄ 2) GaN films with low defect density. We utilized the asymmetric lateral epitaxy to obtain various semipolar (11 2 ̄ 2) GaN films having significantly reduced partial dislocations and basal-plane stacking faults (BPSFs). The directionally dependent carrier transport was observed with the lower sheet resistances (Rsh) along the [1 1 ̄ 00] direction. The Rsh ratios of semipolar (11 2 ̄ 2) GaN films were found to be relatively smaller than those of nonpolar a-plane GaN films, possibly due to low BPSF density and the reduced in-plane electric field induced by BPSF along the [11 2 ̄ 3] direction at wurtzite domain boundaries.

    Original languageEnglish
    Article number162103
    JournalApplied Physics Letters
    Volume103
    Issue number16
    DOIs
    Publication statusPublished - 2013 Oct 14

    Bibliographical note

    Funding Information:
    The authors would like to thank Dr. Y. G. Seo at the Korea Electronics Technology Institute for X-ray diffraction measurements and helpful discussions. This work was supported by 2013 Hongik University Research Fund.

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

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