Ion induced damage in strained CdZnSe/ZnSe quantum well structures

  • L. M. Sparing*
  • , P. D. Wang
  • , A. M. Mintairov
  • , S. Lee
  • , U. Bindley
  • , C. H. Chen
  • , S. S. Shi
  • , J. K. Furdyna
  • , J. L. Merz
  • , G. L. Snider
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

A study of the effects of reactive ion etching on molecular beam epitaxy grown (CdxZn1-xSe/ZnSe) strained quantum well (QW) samples using low temperature photoluminescence reveals a blue shift in the characteristic peak position of the 8 nm QW when exposed to plasmas of H2, D2, or He. Based on experimental results we suggest that this blue shift is a result of ion induced damage interacting with strain present in the as-grown QW. The QW is compressively strained at the interface with additional local strains in the QW lattice due to its random ternary alloy composition. The shallowest QW samples exhibit a peak in the blue shift as a function of bias voltage, with a reduced blue shift seen at high voltages.

Original languageEnglish
Pages (from-to)2652-2655
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume15
Issue number6
DOIs
Publication statusPublished - 1997
Externally publishedYes

Bibliographical note

Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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