ITO/Ag/AlN/Al2O3 multilayer electrodes with conductive channels: Application in ultraviolet light-emitting diodes

Byeong Ryong Lee, Tae Ho Lee, Kyung Rock Son, Tae Geun Kim

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)


There have been considerable efforts to use oxide/metal/oxide (OMO) multilayers as transparent conductive electrodes (TCEs) for various optoelectronic devices. However, it was difficult to achieve high transmittances in the UV region because relatively narrow-bandgap oxide films such as indium tin oxide (ITO) and ZnO have been used to achieve low series resistances. In this study, ITO/Ag/AlN/Al2O3-based TCEs were fabricated by incorporating conductive channels in AlN/Al2O3 wide-bandgap bilayers under electric fields. These multilayered films exhibited much higher transmittances in the UV region and lower sheet resistances compared to the reference ITO and ITO/Ag/ITO electrodes. These films were then applied in GaN-based near-UV LEDs, following the investigation of ohmic conduction mechanisms at the interface between p-GaN and ITO/Ag/AlN/Al2O3 TCE layers. The LEDs with ITO/Ag/AlN/Al2O3 multilayers exhibited much lower forward voltages and higher output powers than those of the other two LEDs. This method offers a new and effective route to enhance the transmittance of OMO-based TCEs at a shorter wavelength without losses in electrical conductivity.

Original languageEnglish
Pages (from-to)21-27
Number of pages7
JournalJournal of Alloys and Compounds
Publication statusPublished - 2018 Apr 15

Bibliographical note

Funding Information:
This work was supported by the National Research Foundation of Korea grant funded by the Korea government (No. 2016R1A3B 1908249 ).

Publisher Copyright:
© 2018 Elsevier B.V.


  • Conductive channel
  • Oxide metal oxide
  • Transparent conductive electrode
  • Ultraviolet light-emitting diode
  • Wide bandgap

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry


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