Large-scale nanopatterning of metal surfaces by target-ion induced plasma sputtering (TIPS)

Keyphrases

• Biomedical Devices 33%
• Bottom-up Nanofabrication 33%
• Chemical Devices 33%
• Conventional DCs 33%
• DC Magnetron Sputtering 33%
• Ion-induced 33%
• Large Surfaces 33%
• Large-scale Nanopatterning 100%
• Magnetic Devices 33%
• Metal Substrate 33%
• Metal Surface 100%
• Nanofabrication 33%
• Nanofabrication Techniques 33%
• Nanopatterning 100%
• Negative Substrate Bias 33%
• Pair-ion Plasma 100%
• Plasma Sputtering 100%
• Ripple Pattern 33%
• Self-organization 33%
• Size Tunability 33%
• Substrate Bias Voltage 33%
• Substrate Voltage 33%
• Surface Topography 33%
• Surface-to-volume Ratio 33%

Engineering

• Bias Voltage 50%
• Magnetron 50%
• Microscale 50%
• Nanofabrication Process 100%
• Nanopatterning 100%
• One Step 50%
• Self-Organization 50%
• Substrate Bias 50%
• Surface Topography 50%
• Volume Ratio 50%

Material Science

• Magnetic Device 50%
• Metal Surface 100%
• Surface (Surface Science) 50%
• Surface Topography 50%