Light-emitting devices using micromachined Si-tip mirror arrays

Yun Hi Lee, Sang Jo Lee, Byeong Kwon Ju, Myung Hwan Oh

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)


In this paper we introduce a new structure and process scheme to generate visible light by the combination of Si-tip reflectors with thin film electroluminescent structure and report preliminary results of light emission observed from the structure. As a result, 3600 reflectors were formed within one pixel and these picture elements create a well-concentrated visible light around the point reflectors under a bipolar pulse excitation. Even though the absolute luminance level is not very high, this result is very interesting because the front emission observed by a viewer originated intrinsically from the edge emission. The new devices suggested will contribute to the development of a high-bright micro-display with the integrated drivers.

Original languageEnglish
Pages (from-to)138-142
Number of pages5
JournalSensors and Actuators, A: Physical
Issue number2
Publication statusPublished - 2000 Mar 10
Event12th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99) - Orlando, FL, USA
Duration: 1999 Jan 171999 Jan 21

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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