Linker-free directed assembly of high-performance integrated devices based on nanotubes and nanowires

M. Lee, J. Im, B. Y. Lee, S. Myung, J. Kang, L. Huang, Y. K. Kwon, S. Hong

Research output: Contribution to journalArticlepeer-review

191 Citations (Scopus)

Abstract

Advanced electronic devices based on carbon nanotubes (NTs) and various types of nanowires (NWs) could have a role in nextgeneration semiconductor architectures. However, the lack of a general fabrication method has held back the development of these devices for practical applications. Here we report an assembly strategy for devices based on NTs and NWs. Inert surface molecular patterns were used to direct the adsorption and alignment of NTs and NWs on bare surfaces to form device structures without the use of linker molecules. Substrate bias further enhanced the amount of NT and NW adsorption. Significantly, as all the processing steps can be performed with conventional microfabrication facilities, our method is readily accessible to the present semiconductor industry. We use this method to demonstrate large-scale assembly of NT- and NW-based integrated devices and their applications. We also provide extensive analysis regarding the reliability of the method.

Original languageEnglish
Pages (from-to)66-71
Number of pages6
JournalNature Nanotechnology
Volume1
Issue number1
DOIs
Publication statusPublished - 2006 Jan
Externally publishedYes

Bibliographical note

Funding Information:
This project has been supported by the Korean Science and Engineering Foundation through the National Research Laboratory program and Tera-level Nano Devices program. S.H. acknowledges partial support from the Nano-Systems Institute–National Core Research Center and the Korean Ministry of Commerce, Industry, and Energy. Y.-K.K. acknowledges partial support from the Nanomanufacturing Center of Excellence. Correspondence and requests for materials should be addressed to S.H. Supplementary information accompanies this paper on www.nature.com/naturenanotechnology.

ASJC Scopus subject areas

  • Bioengineering
  • Atomic and Molecular Physics, and Optics
  • Biomedical Engineering
  • General Materials Science
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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