Low-temperature performance of yttria-stabilized zirconia prepared by atomic layer deposition

Dong Young Jang, Ho Keun Kim, Jun Woo Kim, Kiho Bae, Meike V.F. Schlupp, Suk Won Park, Michel Prestat, Joon Hyung Shim

Research output: Contribution to journalArticlepeer-review

30 Citations (Scopus)


We report on the performance of thin-film yttria-stabilized zirconia (YSZ) synthesized by atomic layer deposition (ALD) at temperatures of 50-525 °C. Electrochemical impedance spectroscopy (EIS) was used for conductivity measurements. Relatively high conductivity values were observed in the low-temperature region when compared to reference values of YSZ synthesized by other methods. To investigate the conduction mechanism, various experimental variables were modified during the electrical measurements, including the ratio of yttria to zirconia in the ALD YSZ films and the atmospheric conditions. To relate the electrical properties to the structural characteristics, the crystallinity and microstructure were investigated using transmission electron microscopy (TEM) and X-ray diffraction (XRD). Finally, the suitability of an ALD YSZ membrane as the electrolyte of micro solid oxide fuel cells was evaluated. An open circuit voltage of almost 1 V and decent power output were successfully measured below 100 °C.

Original languageEnglish
Pages (from-to)611-618
Number of pages8
JournalJournal of Power Sources
Publication statusPublished - 2015 Jan 15


  • Atomic layer deposition
  • Ion conduction
  • Solid oxide fuel cells
  • Yttria-stabilized zirconia

ASJC Scopus subject areas

  • Renewable Energy, Sustainability and the Environment
  • Energy Engineering and Power Technology
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering


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