Magnesium oxide gate dielectrics grown on GaN using an electron cyclotron resonance plasma

B. P. Gila, A. H. Onstine, J. Kim, K. K. Allums, F. Ren, C. R. Abernathy, S. J. Pearton

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)
Original languageEnglish
Pages (from-to)2368-2370
Number of pages3
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number6
Publication statusPublished - 2003
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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