@article{9279124ee8a748b48c004a263497c8e2,
title = "Magnesium oxide gate dielectrics grown on GaN using an electron cyclotron resonance plasma",
author = "Gila, {B. P.} and Onstine, {A. H.} and J. Kim and Allums, {K. K.} and F. Ren and Abernathy, {C. R.} and Pearton, {S. J.}",
year = "2003",
doi = "10.1116/1.1620516",
language = "English",
volume = "21",
pages = "2368--2370",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "6",
}