Magnetic, microstructural, and compositional characterization of Fe-N thin films for recording sensor applications

Y. K. Kim; P. B. Narayan

doi:10.1116/1.579581

Magnetic, microstructural, and compositional characterization of Fe-N thin films for recording sensor applications

Y. K. Kim, P. B. Narayan

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

Abstract

The dependence of microstructural characteristics and magnetic properties on the processing conditions of reactively dc magnetron sputter-deposited Fe-N films (≤1000 A) was investigated for advanced recording sensor applications. The N content of the film increases linearly as the ratio of N₂ to Ar flow rate increases. Magnetic properties could be significantly modified by the incorporation of N into the Fe matrix. A N-content range was discovered where desirable soft magnetic properties such as low coercivity and low magnetostriction could be achieved. The soft magnetic properties originated from the amorphous microstructure as evidenced by transmission electron microscopy and x-ray diffraction. The electrical resistivity of Fe-N films with soft magnetic properties was an order of magnitude higher than that of pure Fe or NiFe thin films with comparable thickness.

Original language	English
Pages (from-to)	1040-1043
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	13
Issue number	3
DOIs	https://doi.org/10.1116/1.579581
Publication status	Published - 1995 May
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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AB - The dependence of microstructural characteristics and magnetic properties on the processing conditions of reactively dc magnetron sputter-deposited Fe-N films (≤1000 A) was investigated for advanced recording sensor applications. The N content of the film increases linearly as the ratio of N2 to Ar flow rate increases. Magnetic properties could be significantly modified by the incorporation of N into the Fe matrix. A N-content range was discovered where desirable soft magnetic properties such as low coercivity and low magnetostriction could be achieved. The soft magnetic properties originated from the amorphous microstructure as evidenced by transmission electron microscopy and x-ray diffraction. The electrical resistivity of Fe-N films with soft magnetic properties was an order of magnitude higher than that of pure Fe or NiFe thin films with comparable thickness.

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Magnetic, microstructural, and compositional characterization of Fe-N thin films for recording sensor applications

Abstract

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