Magnetic Properties of Amorphous Ta/CoFeB/MgO/Ta Thin Films on Deformable Substrates with Magnetic Field Angle and Tensile Strain

Ah Hyun Jun, Young Hyun Hwang, Byeongwoo Kang, Seungwon Lee, Jiwon Seok, Jong Seong Lee, Seo Hyun Song, Byeong Kwon Ju

Research output: Contribution to journalArticlepeer-review


Recently, the application of cobalt iron boron (CoFeB) thin films in magnetic sensors has been widely studied owing to their high magnetic moment, anisotropy, and stability. However, most of these studies were conducted on rigid silicon substrates. For diverse applications of magnetic and angle sensors, it is important to explore the properties of ferromagnetic thin films grown on nonrigid deformable substrates. In this study, representative deformable substrates (polyimide (PI), polyethylene naphthalate (PEN), and polydimethylsiloxane (PDMS)), which can be bent or stretched, were used to assess the in-plane magnetic field angle-dependent properties of amorphous Ta/CoFeB/MgO/Ta thin films grown on deformable substrates. The effects of substrate roughness, tensile stress, deformable substrate characteristics, and sputtering on magnetic properties, such as the coercive field (Hc), remanence over saturation magnetization (Mr/Ms), and biaxial characteristics, were investigated. This study presents an unconventional foundation for exploring deformable magnetic sensors capable of detecting magnetic field angles.

Original languageEnglish
Article number7479
Issue number17
Publication statusPublished - 2023 Sept

Bibliographical note

Funding Information:
This work was supported by the Brain Korea 21 Plus Project in 2023, Samsung Electronics Co., Ltd. (IO201214-08159-01), and a Korea Institute for Advancement of Technology (KIAT) grant funded by the South Korean government (MOTIE) (P0020967, Advanced Training Program for Smart Sensor Engineers), and the National Research Foundation of Korea (NRF) grant funded by the South Korean government (MSIT) (2020R1C1C1013567).

Publisher Copyright:
© 2023 by the authors.


  • CoFeB
  • biaxial
  • deformable
  • flexible
  • four-fold
  • in-plane angle sensors
  • magnetic sensors
  • stretchable
  • wearable

ASJC Scopus subject areas

  • Analytical Chemistry
  • Information Systems
  • Atomic and Molecular Physics, and Optics
  • Biochemistry
  • Instrumentation
  • Electrical and Electronic Engineering


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