Capacitance-type alcohol gas sensors using porous silicon (PS) layer as sensitive film were fabricated to measure low alcohol gas concentration. Though sensors using PS layer have shown high sensitivity by large internal surface area, there is still much room for improvement to measure low breath alcohol concentration especially at room temperature. In this work, we measured the variation of the capacitance for the range of 0 to 0.5% alcohol concentration from the proposed sensors, and observed how to affect the sensitivity by illumination of UV light. In addition, the effect of CO2 and N2 gases involved commonly in exhaling breath was estimated, and the same experiment against methanol vapor was executed to compare qualitatively with alcohol vapor.
|Number of pages
|Published - 1999
|Proceedings of the 1999 IEEE Systems Readiness Technology Conference 'Test Technology for the New Millennium' - AUTOTESTCON 9 - San Antonio, TX, USA
Duration: 1999 Aug 30 → 1999 Sept 2
ASJC Scopus subject areas
- Computer Science Applications
- Electrical and Electronic Engineering