Mechanical Properties of Silicon Nanowires

Young Soo Sohn, Jinsung Park, Gwonchan Yoon, Jiseok Song, Sang Won Jee, Jung Ho Lee, Sungsoo Na, Taeyun Kwon, Kilho Eom

Research output: Contribution to journalArticlepeer-review

96 Citations (Scopus)


Nanowires have been taken much attention as a nanoscale building block, which can perform the excellent mechanical function as an electromechanical device. Here, we have performed atomic force microscope (AFM)-based nanoindentation experiments of silicon nanowires in order to investigate the mechanical properties of silicon nanowires. It is shown that stiffness of nanowires is well described by Hertz theory and that elastic modulus of silicon nanowires with various diameters from ~100 to ~600 nm is close to that of bulk silicon. This implies that the elastic modulus of silicon nanowires is independent of their diameters if the diameter is larger than 100 nm. This supports that finite size effect (due to surface effect) does not play a role on elastic behavior of silicon nanowires with diameter of >100 nm.

Original languageEnglish
Pages (from-to)211-216
Number of pages6
JournalNanoscale Research Letters
Issue number1
Publication statusPublished - 2010 Jan

Bibliographical note

Funding Information:
Acknowledgments This work supported in part by Korea Science and Engineering Foundation (KOSEF) under Grant No. 2009-0071246 (to K.E.), Korea Research Foundation (KRF) under Grant No. KRF-2008-313-D00031 (to T.K.), Pioneer Research Center Program through National Research Foundation of Korea under Grant No. 2009-0082820 (to Y.-S.S., and J.-H.L.), and KOSEF under Grant No. R11-2007-028-03002 and Grant No. R01-2007-000-10497-0 (to S.N.).


  • Atomic force microscope
  • Elastic modulus
  • Nanoindentation
  • Silicon nanowire

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics


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