MEMS-based fabrication of multi-walled carbon nanotube pH sensor

In this paper, We presents experimental results that demonstrate the pH sensing capability of MW-CNTs. High-density, well-aligned carbon nanotubes, which are MW-CNTs and vertically aligned on a large area of substrate, has been synthesized. The absorption of different range of pH buffer solution in the MW-CNTs changes the conductivity of the MW-CNTs at room temperature. A MEMS-based fabrication process was developed to fabricate a device where MW-CNTs based sensing material was precisely assembled pattern.