MEMS-based thin-film solid-oxide fuel cells

Jihwan An, Joon Hyung Shim, Young Beom Kim, Joong Sun Park, Wonyoung Lee, Turgut M. Gür, Fritz B. Prinz

Research output: Contribution to journalArticlepeer-review

34 Citations (Scopus)


Thin-film solid-oxide fuel cells (TF-SOFCs) fabricated using microelectromechanical systems (MEMS) processing techniques not only help lower the cell operating temperature but also provide a convenient platform for studying cathodic losses. Utilizing these platforms, cathode kinetics can be enhanced dramatically by engineering the microstructure of the cathode/electrolyte interface by increasing the surface grain-boundary density. Nanoscale secondary ion mass spectrometry and high-resolution transmission electron microscopy studies have shown that oxygen exchange at electrolyte surface grain boundaries is facilitated by a high population of oxide-ion vacancies segregating preferentially to the grain boundaries. Furthermore, three-dimensional structuring of TF-SOFCs enabled by various lithography methods also helps increase the active surface area and enhance the surface exchange reaction. Although their practical prospects are yet to be verified, MEMS-based TF-SOFC platforms hold the potential to provide high-performance for low-temperature SOFC applications.

Original languageEnglish
Pages (from-to)798-804
Number of pages7
JournalMRS Bulletin
Issue number9
Publication statusPublished - 2014 Sept 10


  • Grain boundaries
  • atomic layer deposition
  • energy generation
  • nanostructure
  • secondary ion mass spectroscopy (SIMS)
  • transmission electron microscopy (TEM)

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry


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