MEMS neural probe array for multiple-site optical stimulation with low-loss optical waveguide by using thick glass cladding layer

Yoojin Son; Hyunjoo Jenny Lee; Dohee Kim; Yun Kyung Kim; Eui Sung Yoon; Ji Yoon Kang; Nakwon Choi; Tae Geun Kim; Il Joo Cho

doi:10.1109/MEMSYS.2014.6765775

MEMS neural probe array for multiple-site optical stimulation with low-loss optical waveguide by using thick glass cladding layer

Yoojin Son, Hyunjoo Jenny Lee, Dohee Kim, Yun Kyung Kim, Eui Sung Yoon, Ji Yoon Kang, Nakwon Choi, Tae Geun Kim, Il Joo Cho

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

8 Citations (Scopus)

Abstract

We present a MEMS neural probe array for multiple-site optical stimulation with low-loss SU-8 optical waveguides. An embedded 20-μm-thick cladding layer was formed by glass reflow process; due to this embedded structure, no additional thickness was required. In addition, optical loss was reduced by using the thick cladding layer and integrating a thick SU-8 layer as a core layer. The low-loss optical waveguide enables multiple-site stimulation with two-step optical splitters. Using the presented probe array, we also demonstrate a successful in-vivo optical stimulation through recording of neural signals from the hippocampus of a transgenic ChR2-YFP mouse. Recorded neural signals were synchronized with light pulses, which confirms that neurons were successfully stimulated by the blue light and the integrated electrode array successfully recorded the neural signals from activated neurons.

Original language	English
Title of host publication	MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	853-856
Number of pages	4
ISBN (Print)	9781479935086
DOIs	https://doi.org/10.1109/MEMSYS.2014.6765775
Publication status	Published - 2014
Externally published	Yes
Event	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States Duration: 2014 Jan 26 → 2014 Jan 30

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Country/Territory	United States
City	San Francisco, CA
Period	14/1/26 → 14/1/30

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2014.6765775

Cite this

Son, Y., Lee, H. J., Kim, D., Kim, Y. K., Yoon, E. S., Kang, J. Y., Choi, N., Kim, T. G., & Cho, I. J. (2014). MEMS neural probe array for multiple-site optical stimulation with low-loss optical waveguide by using thick glass cladding layer. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 853-856). Article 6765775 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765775

MEMS neural probe array for multiple-site optical stimulation with low-loss optical waveguide by using thick glass cladding layer. / Son, Yoojin; Lee, Hyunjoo Jenny; Kim, Dohee et al.
MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 853-856 6765775 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Son, Y, Lee, HJ, Kim, D, Kim, YK, Yoon, ES, Kang, JY, Choi, N, Kim, TG & Cho, IJ 2014, MEMS neural probe array for multiple-site optical stimulation with low-loss optical waveguide by using thick glass cladding layer. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765775, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 853-856, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, United States, 14/1/26. https://doi.org/10.1109/MEMSYS.2014.6765775

Son Y, Lee HJ, Kim D, Kim YK, Yoon ES, Kang JY et al. MEMS neural probe array for multiple-site optical stimulation with low-loss optical waveguide by using thick glass cladding layer. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 853-856. 6765775. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2014.6765775

Son, Yoojin ; Lee, Hyunjoo Jenny ; Kim, Dohee et al. / MEMS neural probe array for multiple-site optical stimulation with low-loss optical waveguide by using thick glass cladding layer. MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 853-856 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "MEMS neural probe array for multiple-site optical stimulation with low-loss optical waveguide by using thick glass cladding layer",

abstract = "We present a MEMS neural probe array for multiple-site optical stimulation with low-loss SU-8 optical waveguides. An embedded 20-μm-thick cladding layer was formed by glass reflow process; due to this embedded structure, no additional thickness was required. In addition, optical loss was reduced by using the thick cladding layer and integrating a thick SU-8 layer as a core layer. The low-loss optical waveguide enables multiple-site stimulation with two-step optical splitters. Using the presented probe array, we also demonstrate a successful in-vivo optical stimulation through recording of neural signals from the hippocampus of a transgenic ChR2-YFP mouse. Recorded neural signals were synchronized with light pulses, which confirms that neurons were successfully stimulated by the blue light and the integrated electrode array successfully recorded the neural signals from activated neurons.",

author = "Yoojin Son and Lee, {Hyunjoo Jenny} and Dohee Kim and Kim, {Yun Kyung} and Yoon, {Eui Sung} and Kang, {Ji Yoon} and Nakwon Choi and Kim, {Tae Geun} and Cho, {Il Joo}",

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AU - Son, Yoojin

AU - Lee, Hyunjoo Jenny

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AU - Yoon, Eui Sung

AU - Kang, Ji Yoon

AU - Choi, Nakwon

AU - Kim, Tae Geun

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AB - We present a MEMS neural probe array for multiple-site optical stimulation with low-loss SU-8 optical waveguides. An embedded 20-μm-thick cladding layer was formed by glass reflow process; due to this embedded structure, no additional thickness was required. In addition, optical loss was reduced by using the thick cladding layer and integrating a thick SU-8 layer as a core layer. The low-loss optical waveguide enables multiple-site stimulation with two-step optical splitters. Using the presented probe array, we also demonstrate a successful in-vivo optical stimulation through recording of neural signals from the hippocampus of a transgenic ChR2-YFP mouse. Recorded neural signals were synchronized with light pulses, which confirms that neurons were successfully stimulated by the blue light and the integrated electrode array successfully recorded the neural signals from activated neurons.

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MEMS neural probe array for multiple-site optical stimulation with low-loss optical waveguide by using thick glass cladding layer

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