MEMS true-time delay circuit for broadband antennas

M. Kim, J. B. Hacker, R. E. Mihailovich, J. F. DeNatale

Research output: Contribution to journalConference articlepeer-review


A monolithic true-time delay (TTD) circuit based on metal-contact RF MEMS microrelays has been successfully fabricated and characterized. The TTD circuit was designed to produce flat delay time over a DC-to-40 GHz bandwidth with full 360-degree phase control at 22.5-degree intervals at 10.8 GHz. Measurements show a close match to the designed delay times for all sixteen delay states with 2.2 to 2.6 dB of insertion loss at 10 GHz. The worst group delay ripple in the DC-to-30 GHz range was 3 ps, well within the single bit delay time of 5.8 ps.

Original languageEnglish
Pages (from-to)662-665
Number of pages4
JournalIEEE Antennas and Propagation Society, AP-S International Symposium (Digest)
Publication statusPublished - 2001
Event2001 IEEE Antennas and Propagation Society International Symposium -FDTD and Multi-Resolution Methods- - Boston, MA, United States
Duration: 2001 Jul 82001 Jul 13


  • Antenna
  • Broadband
  • Microrelay
  • Phase shifter
  • True-time delay

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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