Methane detection using Pt-gated AlGaN/GaN high electron mobility transistor based Schottky diodes

  • Yuyin Xi
  • , Lu Liu
  • , Fan Ren
  • , Stephen J. Pearton
  • , Jihyun Kim
  • , Amir Dabiran
  • , Peter P. Chow

    Research output: Contribution to journalArticlepeer-review

    14 Citations (Scopus)

    Abstract

    Pt-gated AlGaN/GaN high electron mobility transistor based Schottky diodes were employed to detect methane. A detection sensitivity >100 was obtained for the diodes under reverse bias, and this was one order of magnitude higher than the sensitivity of the diodes operated under forward bias. A new method to extract the response time was demonstrated by taking the derivative of diode current, allowing a reduction in the sensor response time by 80%. Methane sensing experiments were conducted at different temperatures, and an Arrhenius plot of the data determined an activation energy of 57 kJ/mol for the sensing process.

    Original languageEnglish
    Article number032203
    JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
    Volume31
    Issue number3
    DOIs
    Publication statusPublished - 2013 May

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Instrumentation
    • Process Chemistry and Technology
    • Surfaces, Coatings and Films
    • Electrical and Electronic Engineering
    • Materials Chemistry

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