A liquid lens based on the electrowetting phenomenon was designed to be cylindrical to minimize dead area. The lens was fabricated with microelectromechanical-system (MEMS) technology using silicon thin film and wafer bonding processes. A multiple dielectric layer comprising Teflon, silicon nitride, and thermal oxide was formed on the cylinder wall. With a change of 11 Vrms in the applied bias, the lens module, including the fabricated liquid lens, showed a focal length change of approximately 166mm. A capsule endoscope was assembled, including the lens module, and was successfully used to take images of a pig colon at various focal lengths.
|Number of pages||4|
|Journal||Japanese journal of applied physics|
|Publication status||Published - 2009 May|
ASJC Scopus subject areas
- Physics and Astronomy(all)