Abstract
A liquid lens based on the electrowetting phenomenon was designed to be cylindrical to minimize dead area. The lens was fabricated with microelectromechanical-system (MEMS) technology using silicon thin film and wafer bonding processes. A multiple dielectric layer comprising Teflon, silicon nitride, and thermal oxide was formed on the cylinder wall. With a change of 11 Vrms in the applied bias, the lens module, including the fabricated liquid lens, showed a focal length change of approximately 166mm. A capsule endoscope was assembled, including the lens module, and was successfully used to take images of a pig colon at various focal lengths.
Original language | English |
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Pages (from-to) | 524041-524044 |
Number of pages | 4 |
Journal | Japanese journal of applied physics |
Volume | 48 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2009 May |
ASJC Scopus subject areas
- General Engineering
- General Physics and Astronomy