Microelectromechanical-system-based variable-focus liquid lens for capsule endoscopes

Sang Won Seo; Seungoh Han; Jun Ho Seo; Young Mok Kim; Moon Sik Kang; Nam Ki Min; Woo Beom Choi; Man Young Sung

doi:10.1143/JJAP.48.052404

Microelectromechanical-system-based variable-focus liquid lens for capsule endoscopes

Sang Won Seo, Seungoh Han, Jun Ho Seo, Young Mok Kim, Moon Sik Kang, Nam Ki Min, Woo Beom Choi, Man Young Sung

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Abstract

A liquid lens based on the electrowetting phenomenon was designed to be cylindrical to minimize dead area. The lens was fabricated with microelectromechanical-system (MEMS) technology using silicon thin film and wafer bonding processes. A multiple dielectric layer comprising Teflon, silicon nitride, and thermal oxide was formed on the cylinder wall. With a change of 11 Vrms in the applied bias, the lens module, including the fabricated liquid lens, showed a focal length change of approximately 166mm. A capsule endoscope was assembled, including the lens module, and was successfully used to take images of a pig colon at various focal lengths.

Original language	English
Pages (from-to)	524041-524044
Number of pages	4
Journal	Japanese journal of applied physics
Volume	48
Issue number	5
DOIs	https://doi.org/10.1143/JJAP.48.052404
Publication status	Published - 2009 May

ASJC Scopus subject areas

General Engineering
General Physics and Astronomy

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10.1143/JJAP.48.052404

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title = "Microelectromechanical-system-based variable-focus liquid lens for capsule endoscopes",

abstract = "A liquid lens based on the electrowetting phenomenon was designed to be cylindrical to minimize dead area. The lens was fabricated with microelectromechanical-system (MEMS) technology using silicon thin film and wafer bonding processes. A multiple dielectric layer comprising Teflon, silicon nitride, and thermal oxide was formed on the cylinder wall. With a change of 11 Vrms in the applied bias, the lens module, including the fabricated liquid lens, showed a focal length change of approximately 166mm. A capsule endoscope was assembled, including the lens module, and was successfully used to take images of a pig colon at various focal lengths.",

author = "Seo, \{Sang Won\} and Seungoh Han and Seo, \{Jun Ho\} and Kim, \{Young Mok\} and Kang, \{Moon Sik\} and Min, \{Nam Ki\} and Choi, \{Woo Beom\} and Sung, \{Man Young\}",

year = "2009",

month = may,

doi = "10.1143/JJAP.48.052404",

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T1 - Microelectromechanical-system-based variable-focus liquid lens for capsule endoscopes

AU - Seo, Sang Won

AU - Han, Seungoh

AU - Seo, Jun Ho

AU - Kim, Young Mok

AU - Kang, Moon Sik

AU - Min, Nam Ki

AU - Choi, Woo Beom

AU - Sung, Man Young

PY - 2009/5

Y1 - 2009/5

N2 - A liquid lens based on the electrowetting phenomenon was designed to be cylindrical to minimize dead area. The lens was fabricated with microelectromechanical-system (MEMS) technology using silicon thin film and wafer bonding processes. A multiple dielectric layer comprising Teflon, silicon nitride, and thermal oxide was formed on the cylinder wall. With a change of 11 Vrms in the applied bias, the lens module, including the fabricated liquid lens, showed a focal length change of approximately 166mm. A capsule endoscope was assembled, including the lens module, and was successfully used to take images of a pig colon at various focal lengths.

AB - A liquid lens based on the electrowetting phenomenon was designed to be cylindrical to minimize dead area. The lens was fabricated with microelectromechanical-system (MEMS) technology using silicon thin film and wafer bonding processes. A multiple dielectric layer comprising Teflon, silicon nitride, and thermal oxide was formed on the cylinder wall. With a change of 11 Vrms in the applied bias, the lens module, including the fabricated liquid lens, showed a focal length change of approximately 166mm. A capsule endoscope was assembled, including the lens module, and was successfully used to take images of a pig colon at various focal lengths.

UR - https://www.scopus.com/pages/publications/68349120452

U2 - 10.1143/JJAP.48.052404

DO - 10.1143/JJAP.48.052404

M3 - Article

AN - SCOPUS:68349120452

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VL - 48

SP - 524041

EP - 524044

JO - Japanese journal of applied physics

JF - Japanese journal of applied physics

IS - 5

ER -

Microelectromechanical-system-based variable-focus liquid lens for capsule endoscopes

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