TY - GEN
T1 - Microfabirated clark-type sensor for measuing dissolved oxygen
AU - Park, Jungil
AU - Chang, Jong Hyeon
AU - Choi, Myungki
AU - Pak, James Jungho
AU - Lee, Dong Young
AU - Pak, Youngmi Kim
PY - 2007
Y1 - 2007
N2 - This paper presents a microfabricated Clark-type sensor which exactly can measure dissolved oxygen in the cell containing solution. We designed and fabricated a microfabircated Clark-type sensor for measuring the oxygen respiration level of few cells. The microfabricated Clark-type sensor is composed of 3-electrodes on a glass substrate, a FEP (Fluorinated ethylene propylene) oxygen-permeable membrane, and PDMS (Polydimethylsiloxane) reservoir for storing few cells containing solution. The microfabricated Clark-type sensor was fabricated using MEMS technology. Thin-film Ag/AgCl was employed as a reference electrode and its durability was verified by obtaining a stable open circuit potential versus a commercial Ag/AgCl electrode for 2 hours. Response time, reproducibility and linearity of the fabricated oxygen sensor were examined by amperometry. The fabricated Clark-type sensor showed 40sec of 90% response time, reproducibility with 1.37nA standard deviation of 97.03nA mean in the full-oxygen state and 0.26nA standard deviation of 3.25nA mean in the zero-oxygen state, and an excellent linearity with a correlation coefficient of 0.994.
AB - This paper presents a microfabricated Clark-type sensor which exactly can measure dissolved oxygen in the cell containing solution. We designed and fabricated a microfabircated Clark-type sensor for measuring the oxygen respiration level of few cells. The microfabricated Clark-type sensor is composed of 3-electrodes on a glass substrate, a FEP (Fluorinated ethylene propylene) oxygen-permeable membrane, and PDMS (Polydimethylsiloxane) reservoir for storing few cells containing solution. The microfabricated Clark-type sensor was fabricated using MEMS technology. Thin-film Ag/AgCl was employed as a reference electrode and its durability was verified by obtaining a stable open circuit potential versus a commercial Ag/AgCl electrode for 2 hours. Response time, reproducibility and linearity of the fabricated oxygen sensor were examined by amperometry. The fabricated Clark-type sensor showed 40sec of 90% response time, reproducibility with 1.37nA standard deviation of 97.03nA mean in the full-oxygen state and 0.26nA standard deviation of 3.25nA mean in the zero-oxygen state, and an excellent linearity with a correlation coefficient of 0.994.
UR - http://www.scopus.com/inward/record.url?scp=48349145708&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2007.4388677
DO - 10.1109/ICSENS.2007.4388677
M3 - Conference contribution
AN - SCOPUS:48349145708
SN - 1424412617
SN - 9781424412617
T3 - Proceedings of IEEE Sensors
SP - 1412
EP - 1415
BT - The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
T2 - 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Y2 - 28 October 2007 through 31 October 2007
ER -