@inproceedings{a447c13d577c48c9aa7959ced2ca93ec,
title = "Microfluidic devices fabricated by LTCC combined with thick film lithography",
abstract = "Low temperature co-fired ceramic (LTCC) process combined with thick film photolithography was employed to fabricate ceramic-based microfluidic devices. To check the applicability of novel process, three types of passive mixers, diffusion-driven T-type mixers with different channel width and convection-driven chaotic mixer, were fabricated and their microfluidic performance was evaluated. It was confirmed that the degree of mixing in ceramic-based microfluidic passive mixers was well matched with the numerical simulation data.",
keywords = "Ceramic, LTCC, Lithography, Microfluidic, Passive mixer",
author = "Yoon, {Young Joon} and Jaekyung Choi and Lim, {Jong Woo} and Kim, {Hyo Tae} and Jihoon Kim and Choi, {Youn Suk} and Lee, {Jong Heun} and Kim, {Jong Hee}",
note = "Copyright: Copyright 2010 Elsevier B.V., All rights reserved.; International Conference on Materials for Advanced Technologies, ICMAT 2009 ; Conference date: 28-06-2009 Through 03-07-2009",
year = "2009",
doi = "10.4028/www.scientific.net/AMR.74.303",
language = "English",
isbn = "0878493212",
series = "Advanced Materials Research",
pages = "303--306",
booktitle = "NEMS/MEMS Technology and Devices - Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, ICMAT 2009",
}