Micromachined catalytic combustible hydrogen gas sensor

Eui Bok Lee; In Sung Hwang; Jung Ho Cha; Ho Jun Lee; Won Bae Lee; James Jungho Pak; Jong Heun Lee; Byeong Kwon Ju

doi:10.1016/j.snb.2010.11.004

Micromachined catalytic combustible hydrogen gas sensor

Eui Bok Lee, In Sung Hwang, Jung Ho Cha, Ho Jun Lee, Won Bae Lee, James Jungho Pak, Jong Heun Lee, Byeong Kwon Ju

Research output: Contribution to journal › Article › peer-review

135 Citations (Scopus)

Abstract

An integrated catalytic combustion H₂ sensor has been fabricated by using MEMS technology. Both the sensing elements and the reference elements could be integrated into the suspended micro heaters connected in a suitable circuit such as a Wheatstone configuration with low power consumption. Two sensitive elements and two reference sensors were integrated together onto a single chip. The size of chip was 5.76 mm² and the catalytic combustion sensor showed high response to H₂ at operating voltage of 1 V. The response and recovery times to 1000 ppm H₂ were 0.36 s and 1.29 s, respectively.

Original language	English
Pages (from-to)	392-397
Number of pages	6
Journal	Sensors and Actuators, B: Chemical
Volume	153
Issue number	2
DOIs	https://doi.org/10.1016/j.snb.2010.11.004
Publication status	Published - 2011 Apr 20

Bibliographical note

Funding Information:
This work was supported by World Class University (WCU, R32-2009-000-10082-0) Project of the Ministry of Education, Science and Technology (Korea Science and Engineering Foundation) and partially supported by Basic Science Research Program through the National Research Foundation (NRF) of Korea funded by the Ministry of Education, Science and Technology (No. 2009-0083126 ). This work of J. -H. Lee was supported by KOSEF NRL program (No. R0A-2008-000-20032-0).

Keywords

Catalytic combustion
Hydrogen gas sensor
MEMS

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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10.1016/j.snb.2010.11.004

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title = "Micromachined catalytic combustible hydrogen gas sensor",

abstract = "An integrated catalytic combustion H2 sensor has been fabricated by using MEMS technology. Both the sensing elements and the reference elements could be integrated into the suspended micro heaters connected in a suitable circuit such as a Wheatstone configuration with low power consumption. Two sensitive elements and two reference sensors were integrated together onto a single chip. The size of chip was 5.76 mm2 and the catalytic combustion sensor showed high response to H2 at operating voltage of 1 V. The response and recovery times to 1000 ppm H2 were 0.36 s and 1.29 s, respectively.",

keywords = "Catalytic combustion, Hydrogen gas sensor, MEMS",

author = "Lee, {Eui Bok} and Hwang, {In Sung} and Cha, {Jung Ho} and Lee, {Ho Jun} and Lee, {Won Bae} and Pak, {James Jungho} and Lee, {Jong Heun} and Ju, {Byeong Kwon}",

note = "Funding Information: This work was supported by World Class University (WCU, R32-2009-000-10082-0) Project of the Ministry of Education, Science and Technology (Korea Science and Engineering Foundation) and partially supported by Basic Science Research Program through the National Research Foundation (NRF) of Korea funded by the Ministry of Education, Science and Technology (No. 2009-0083126 ). This work of J. -H. Lee was supported by KOSEF NRL program (No. R0A-2008-000-20032-0). ",

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doi = "10.1016/j.snb.2010.11.004",

language = "English",

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pages = "392--397",

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AU - Lee, Eui Bok

AU - Hwang, In Sung

AU - Cha, Jung Ho

AU - Lee, Ho Jun

AU - Lee, Won Bae

AU - Pak, James Jungho

AU - Lee, Jong Heun

AU - Ju, Byeong Kwon

N1 - Funding Information: This work was supported by World Class University (WCU, R32-2009-000-10082-0) Project of the Ministry of Education, Science and Technology (Korea Science and Engineering Foundation) and partially supported by Basic Science Research Program through the National Research Foundation (NRF) of Korea funded by the Ministry of Education, Science and Technology (No. 2009-0083126 ). This work of J. -H. Lee was supported by KOSEF NRL program (No. R0A-2008-000-20032-0).

PY - 2011/4/20

Y1 - 2011/4/20

N2 - An integrated catalytic combustion H2 sensor has been fabricated by using MEMS technology. Both the sensing elements and the reference elements could be integrated into the suspended micro heaters connected in a suitable circuit such as a Wheatstone configuration with low power consumption. Two sensitive elements and two reference sensors were integrated together onto a single chip. The size of chip was 5.76 mm2 and the catalytic combustion sensor showed high response to H2 at operating voltage of 1 V. The response and recovery times to 1000 ppm H2 were 0.36 s and 1.29 s, respectively.

AB - An integrated catalytic combustion H2 sensor has been fabricated by using MEMS technology. Both the sensing elements and the reference elements could be integrated into the suspended micro heaters connected in a suitable circuit such as a Wheatstone configuration with low power consumption. Two sensitive elements and two reference sensors were integrated together onto a single chip. The size of chip was 5.76 mm2 and the catalytic combustion sensor showed high response to H2 at operating voltage of 1 V. The response and recovery times to 1000 ppm H2 were 0.36 s and 1.29 s, respectively.

KW - Catalytic combustion

KW - Hydrogen gas sensor

KW - MEMS

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M3 - Article

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SP - 392

EP - 397

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

IS - 2

ER -

Micromachined catalytic combustible hydrogen gas sensor

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

Access to Document

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