Micromirror actuation with electrostatic force and plate bending

Seungoh Han, Hojoon Park, Jungho Pak

Research output: Contribution to journalConference articlepeer-review

4 Citations (Scopus)


In this paper, a new method for actuating micro-mirrors, which utilizes bending of the micro-mirror plate, was proposed in order to increase the rotational angle without increasing the sacrificial layer thickness. The analytical model of the proposed actuating method was established and, based on the analytical model, the expected micro-mirror operation is presented. In order to confirm the expected operation surface-micromachined polysilicon micro-mirror was fabricated and tested. The bending of the micro-mirror plate, however, was not observed in the experiment with the fabricated micro-mirror. There are two possible reasons for this. One is the driving force reduction due to the decreasing of the voltage difference between the micro-mirror plate and underlying electrode caused by electrical conducting between the two. The other is the non-optimized design in the mechanical structure which causes the bending of the supporting beam before the plate starts to bend.

Original languageEnglish
Pages (from-to)117-123
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 1999
EventProceedings of the 1999 Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures - Singapore, Singapore
Duration: 1999 Dec 11999 Dec 3

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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