With a growing interest in two-dimensional transition metal dichalcogenide (TMD), etching the structure of TMD for further application is a challenge due to its thermal stability by a high melting point. Here, we report on diverse etched structures in MoS 2 flakes based on the catalytic oxidation using a Co catalyst. After impregnated with a Co precursor, MoS 2 flakes were oxidized in air by induction heating to obtain an etched structure. As a result, microscopic observation revealed that diverse etched structures in the shape of a channel and a pit were created in the MoS 2 flakes. Especially, the catalytic etching by CoO nanoparticles produced two types of channels which have an angle of 120° and 150° respectively. Also, a pit with a depth of approximately 3 nm was found on the oxidized surface of MoS 2 flakes. Our results open a new perspective to control the edge site of TMD flakes including S element as well as MoS 2 flakes.
Bibliographical noteFunding Information:
This research was supported by Multi-Ministry Collaborative R&D Program (Development of Techniques for Identification and Analysis of Gas Molecules to Protect Against Toxic Substances) through the National Research Foundation of Korea (NRF) funded by KNPA , MSIT , MOTIE , ME , NFA ( NRF-2017M3D9A1073924 ).
© 2018 Elsevier B.V.
- Catalytic etching
- Cobalt oxide
ASJC Scopus subject areas
- General Chemistry
- Condensed Matter Physics
- General Physics and Astronomy
- Surfaces and Interfaces
- Surfaces, Coatings and Films