Microscopic observation of catalytically etched channels and pits in MoS 2 flakes

Do Hyun Kim, Jun Hee Choi, Jun Eon Jin, Dong Jin Lee, Gyu Tae Kim

    Research output: Contribution to journalArticlepeer-review

    1 Citation (Scopus)

    Abstract

    With a growing interest in two-dimensional transition metal dichalcogenide (TMD), etching the structure of TMD for further application is a challenge due to its thermal stability by a high melting point. Here, we report on diverse etched structures in MoS 2 flakes based on the catalytic oxidation using a Co catalyst. After impregnated with a Co precursor, MoS 2 flakes were oxidized in air by induction heating to obtain an etched structure. As a result, microscopic observation revealed that diverse etched structures in the shape of a channel and a pit were created in the MoS 2 flakes. Especially, the catalytic etching by CoO nanoparticles produced two types of channels which have an angle of 120° and 150° respectively. Also, a pit with a depth of approximately 3 nm was found on the oxidized surface of MoS 2 flakes. Our results open a new perspective to control the edge site of TMD flakes including S element as well as MoS 2 flakes.

    Original languageEnglish
    Pages (from-to)1053-1058
    Number of pages6
    JournalApplied Surface Science
    Volume467-468
    DOIs
    Publication statusPublished - 2019 Feb 15

    Bibliographical note

    Funding Information:
    This research was supported by Multi-Ministry Collaborative R&D Program (Development of Techniques for Identification and Analysis of Gas Molecules to Protect Against Toxic Substances) through the National Research Foundation of Korea (NRF) funded by KNPA , MSIT , MOTIE , ME , NFA ( NRF-2017M3D9A1073924 ).

    Publisher Copyright:
    © 2018 Elsevier B.V.

    Keywords

    • Catalytic etching
    • Channel
    • Cobalt oxide
    • MoS
    • Oxidation
    • Pit

    ASJC Scopus subject areas

    • General Chemistry
    • Condensed Matter Physics
    • General Physics and Astronomy
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films

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