Microscopic observation of catalytically etched channels and pits in MoS 2 flakes

Do Hyun Kim, Jun Hee Choi, Jun Eon Jin, Dong Jin Lee, Gyu Tae Kim

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


With a growing interest in two-dimensional transition metal dichalcogenide (TMD), etching the structure of TMD for further application is a challenge due to its thermal stability by a high melting point. Here, we report on diverse etched structures in MoS 2 flakes based on the catalytic oxidation using a Co catalyst. After impregnated with a Co precursor, MoS 2 flakes were oxidized in air by induction heating to obtain an etched structure. As a result, microscopic observation revealed that diverse etched structures in the shape of a channel and a pit were created in the MoS 2 flakes. Especially, the catalytic etching by CoO nanoparticles produced two types of channels which have an angle of 120° and 150° respectively. Also, a pit with a depth of approximately 3 nm was found on the oxidized surface of MoS 2 flakes. Our results open a new perspective to control the edge site of TMD flakes including S element as well as MoS 2 flakes.

Original languageEnglish
Pages (from-to)1053-1058
Number of pages6
JournalApplied Surface Science
Publication statusPublished - 2019 Feb 15

Bibliographical note

Funding Information:
This research was supported by Multi-Ministry Collaborative R&D Program (Development of Techniques for Identification and Analysis of Gas Molecules to Protect Against Toxic Substances) through the National Research Foundation of Korea (NRF) funded by KNPA , MSIT , MOTIE , ME , NFA ( NRF-2017M3D9A1073924 ).

Publisher Copyright:
© 2018 Elsevier B.V.


  • Catalytic etching
  • Channel
  • Cobalt oxide
  • MoS
  • Oxidation
  • Pit

ASJC Scopus subject areas

  • General Chemistry
  • Condensed Matter Physics
  • General Physics and Astronomy
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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