Abstract
Pyrolytic carbon (PyC) layers were deposited using methane. The PyC layer deposited with 5% methane showed highly textured graphite, while that deposited using 100% methane showed low textured graphite. The degrees of anisotropy of the carbon layers were measured using an X-ray diffractometer, a transmission electron microscope, and a Raman spectroscope, and the results were compared with those reported previously. The orientation angles obtained from the fast Fourier transformation of the high-resolution transmission electron microscopy images and the ID/IG intensity ratios obtained from the Raman spectra were used to evaluate the anisotropy of the PyC layers.
| Original language | English |
|---|---|
| Pages (from-to) | 291-297 |
| Number of pages | 7 |
| Journal | Journal of the Korean Ceramic Society |
| Volume | 56 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2019 |
Bibliographical note
Funding Information:This work was supported by the Materials/Components Technology Development Program of the Korea Evaluation Institute of Industrial Technology (KEIT) funded by the Ministry of Trade, Industry and Energy (MOTIE) (grant code: 10065691).
Publisher Copyright:
© 2019 Korean Ceramic Society. All rights reserved.
Keywords
- Ceramic matrix composite
- Chemical vapor infiltration
- Pyrolytic carbon
- Raman spectroscope
- Transmission electron microscope
ASJC Scopus subject areas
- Ceramics and Composites
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