Microstructural evolution and electrical resistivity of nanocrystalline W thin films grown by sputtering

  • Yong Jin Kim
  • , Sung Gyu Kang
  • , Yeonju Oh
  • , Gyu Won Kim
  • , In Ho Cha
  • , Heung Nam Han*
  • , Young Keun Kim
    • *Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

    21 Citations (Scopus)

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    Material Science