Microstructure of intrinsic ZnO thin film grown by using atomic layer deposition

Jae Sung Hur, Samseok Jang, Donghwan Kim, Dongjin Byun, Chang Sik Son

    Research output: Contribution to journalArticlepeer-review

    8 Citations (Scopus)

    Abstract

    ZnO thin films were deposited by using atomic layer deposition with a fixed purging time of the DEZinc and the H2O sources of 8 sec and an injection time of 1 sec per source. The ZnO films were formed in the temperature range from 30 °C to 300 °C. The microstructure was altered by varying the temperature, and the shapes and the sizes of the grains were altered by changing the preferred orientation. The surface morphologies and the shapes of the grains were correlated with the preferred orientation, which changed with the growth temperature.

    Original languageEnglish
    Pages (from-to)3033-3037
    Number of pages5
    JournalJournal of the Korean Physical Society
    Volume53
    Issue number5 PART 2
    DOIs
    Publication statusPublished - 2008 Nov

    Keywords

    • Atomic layer deposition (ALD)
    • Microstructure
    • Zinc oxide

    ASJC Scopus subject areas

    • General Physics and Astronomy

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