Microtunneling sensors for vacuum level evaluation of field emission display devices

H. W. Park; B. K. Ju; Y. K. Park; D. J. Lee; Y. H. Lee; C. J. Kim; J. H. Park; M. H. Oh

doi:10.1116/1.1352724

Microtunneling sensors for vacuum level evaluation of field emission display devices

H. W. Park, B. K. Ju, Y. K. Park, D. J. Lee, Y. H. Lee, C. J. Kim, J. H. Park, M. H. Oh

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Lateral type polysilicon field emitters were fabricated and tested in various vacuum levels for the application of a microvacuum sensor. The design and fabrication of the sensor were easy owing to the surface micromachining technique. Field distributions were also characterized by a 3D electromagnetic field simulation tool.

Original language	English
Pages (from-to)	542-545
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	19
Issue number	2
DOIs	https://doi.org/10.1116/1.1352724
Publication status	Published - 2001 Mar

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1116/1.1352724

Cite this

@article{9536249eaaa542febafecc481fa23456,

title = "Microtunneling sensors for vacuum level evaluation of field emission display devices",

abstract = "Lateral type polysilicon field emitters were fabricated and tested in various vacuum levels for the application of a microvacuum sensor. The design and fabrication of the sensor were easy owing to the surface micromachining technique. Field distributions were also characterized by a 3D electromagnetic field simulation tool.",

author = "Park, {H. W.} and Ju, {B. K.} and Park, {Y. K.} and Lee, {D. J.} and Lee, {Y. H.} and Kim, {C. J.} and Park, {J. H.} and Oh, {M. H.}",

year = "2001",

month = mar,

doi = "10.1116/1.1352724",

language = "English",

volume = "19",

pages = "542--545",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "2",

}

TY - JOUR

T1 - Microtunneling sensors for vacuum level evaluation of field emission display devices

AU - Park, H. W.

AU - Ju, B. K.

AU - Park, Y. K.

AU - Lee, D. J.

AU - Lee, Y. H.

AU - Kim, C. J.

AU - Park, J. H.

AU - Oh, M. H.

PY - 2001/3

Y1 - 2001/3

N2 - Lateral type polysilicon field emitters were fabricated and tested in various vacuum levels for the application of a microvacuum sensor. The design and fabrication of the sensor were easy owing to the surface micromachining technique. Field distributions were also characterized by a 3D electromagnetic field simulation tool.

AB - Lateral type polysilicon field emitters were fabricated and tested in various vacuum levels for the application of a microvacuum sensor. The design and fabrication of the sensor were easy owing to the surface micromachining technique. Field distributions were also characterized by a 3D electromagnetic field simulation tool.

UR - http://www.scopus.com/inward/record.url?scp=0035273004&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035273004&partnerID=8YFLogxK

U2 - 10.1116/1.1352724

DO - 10.1116/1.1352724

M3 - Article

AN - SCOPUS:0035273004

SN - 1071-1023

VL - 19

SP - 542

EP - 545

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 2

ER -

Microtunneling sensors for vacuum level evaluation of field emission display devices

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this