Microwave dielectric properties of the BaTi5O11 thin film grown on the poly-Si substrate using rf magnetron sputtering

Bo Yun Jang, Young Hun Jeong, Suk Jin Lee, Sahn Nahm, Ho Jung Sun, Woo Sung Lee, Myong Jae Yoo, Nam Ki Kang, Hwack Joo Lee

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Engineering & Materials Science

Chemical Compounds