Miscibility and nanoporous hybrid film fabrication of methylsilsesquioxane (MSSQ) and star-shaped polymers

Byoung Suhk Kim; Dong Jun Lee; Sung Kyu Min; Young Jun Kim; Soo Hyun Kim; Do Yeung Yoon; Hee Woo Rhee

doi:10.1080/10587250108030093

Miscibility and nanoporous hybrid film fabrication of methylsilsesquioxane (MSSQ) and star-shaped polymers

Byoung Suhk Kim, Dong Jun Lee, Sung Kyu Min, Young Jun Kim, Soo Hyun Kim, Do Yeung Yoon, Hee Woo Rhee

Research output: Contribution to journal › Article › peer-review

Abstract

Star-shaped polycaprolactones (PCL) with 4- or 5-arms were synthesized to be used as a porogen for nanoporous dielectric materials. Methylsilsesquioxane (MSSQ) was used as an inorganic matrix. Miscibility with MSSQ strongly depended on the molecular weight of the porogens used. Dielectric constants of the nanoporous thin films were measured using MIS cell configuration.

Original language	English
Pages (from-to)	301-304
Number of pages	4
Journal	Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals
Volume	370
DOIs	https://doi.org/10.1080/10587250108030093
Publication status	Published - 2001

Bibliographical note

Funding Information:
Ihis work was supported in part by the Korean Collaborative Project for Excellence in Basic System IC Technology (98-B4-CO-OO-O1-00-02).

Keywords

Dielectric constant
Methylsilsesquioxane (MSSQ)
Miscibility
Nanoporosity
Porogen
Thin film

ASJC Scopus subject areas

Condensed Matter Physics

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10.1080/10587250108030093

Cite this

Kim, B. S., Lee, D. J., Min, S. K., Kim, Y. J., Kim, S. H., Yoon, D. Y., & Rhee, H. W. (2001). Miscibility and nanoporous hybrid film fabrication of methylsilsesquioxane (MSSQ) and star-shaped polymers. Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals, 370, 301-304. https://doi.org/10.1080/10587250108030093

Miscibility and nanoporous hybrid film fabrication of methylsilsesquioxane (MSSQ) and star-shaped polymers. / Kim, Byoung Suhk; Lee, Dong Jun; Min, Sung Kyu et al.
In: Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals, Vol. 370, 2001, p. 301-304.

Research output: Contribution to journal › Article › peer-review

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note = "Funding Information: Ihis work was supported in part by the Korean Collaborative Project for Excellence in Basic System IC Technology (98-B4-CO-OO-O1-00-02).",

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AU - Kim, Soo Hyun

AU - Yoon, Do Yeung

AU - Rhee, Hee Woo

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AB - Star-shaped polycaprolactones (PCL) with 4- or 5-arms were synthesized to be used as a porogen for nanoporous dielectric materials. Methylsilsesquioxane (MSSQ) was used as an inorganic matrix. Miscibility with MSSQ strongly depended on the molecular weight of the porogens used. Dielectric constants of the nanoporous thin films were measured using MIS cell configuration.

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KW - Methylsilsesquioxane (MSSQ)

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KW - Nanoporosity

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JO - Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals

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Miscibility and nanoporous hybrid film fabrication of methylsilsesquioxane (MSSQ) and star-shaped polymers

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

Access to Document

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