Modification of the optical properties of ZnO thin films by proton implantation

Yong Ju Ham, Jun Kue Park, W. Lee, Cheol Eui Lee, W. Park

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


Optical properties of proton-implanted ZnO thin film prepared by radio-frequency (rf) magneton sputtering have been studied, the optical constants being obtained from the reflectance measurements by employing Cauchy-Urbach model. Increase in the ordinary refractive index after proton implantation was explained by that in the polarizability. Besides, a slight increase in the optical band gap by proton implantation was identified and discussed in terms of the hydrogen shallow donors introduced by the proton implantation.

Original languageEnglish
Pages (from-to)2403-2406
Number of pages4
JournalMaterials Research Bulletin
Issue number9
Publication statusPublished - 2012 Sept

Bibliographical note

Funding Information:
This work was supported by the National Research Foundation of Korea (NRL Program 2011-0018628, no. 20100-029418 , and Project no. 20090082672). The measurements at the Korean Basic Science Institute (KBSI) are gratefully acknowledged.


  • A. ZnO film
  • B. Proton implantation
  • D. Optical properties

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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