Modification of the optical properties of ZnO thin films by proton implantation

Yong Ju Ham; Jun Kue Park; W. Lee; Cheol Eui Lee; W. Park

doi:10.1016/j.materresbull.2012.05.029

Modification of the optical properties of ZnO thin films by proton implantation

Yong Ju Ham, Jun Kue Park, W. Lee, Cheol Eui Lee^*, W. Park

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

Optical properties of proton-implanted ZnO thin film prepared by radio-frequency (rf) magneton sputtering have been studied, the optical constants being obtained from the reflectance measurements by employing Cauchy-Urbach model. Increase in the ordinary refractive index after proton implantation was explained by that in the polarizability. Besides, a slight increase in the optical band gap by proton implantation was identified and discussed in terms of the hydrogen shallow donors introduced by the proton implantation.

Original language	English
Pages (from-to)	2403-2406
Number of pages	4
Journal	Materials Research Bulletin
Volume	47
Issue number	9
DOIs	https://doi.org/10.1016/j.materresbull.2012.05.029
Publication status	Published - 2012 Sept

Bibliographical note

Funding Information:
This work was supported by the National Research Foundation of Korea (NRL Program 2011-0018628, no. 20100-029418 , and Project no. 20090082672). The measurements at the Korean Basic Science Institute (KBSI) are gratefully acknowledged.

Keywords

A. ZnO film
B. Proton implantation
D. Optical properties

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1016/j.materresbull.2012.05.029

Cite this

@article{1136d02672254e14aa34141bb64c0ae5,

title = "Modification of the optical properties of ZnO thin films by proton implantation",

abstract = "Optical properties of proton-implanted ZnO thin film prepared by radio-frequency (rf) magneton sputtering have been studied, the optical constants being obtained from the reflectance measurements by employing Cauchy-Urbach model. Increase in the ordinary refractive index after proton implantation was explained by that in the polarizability. Besides, a slight increase in the optical band gap by proton implantation was identified and discussed in terms of the hydrogen shallow donors introduced by the proton implantation.",

keywords = "A. ZnO film, B. Proton implantation, D. Optical properties",

author = "Ham, \{Yong Ju\} and Park, \{Jun Kue\} and W. Lee and Lee, \{Cheol Eui\} and W. Park",

note = "Funding Information: This work was supported by the National Research Foundation of Korea (NRL Program 2011-0018628, no. 20100-029418 , and Project no. 20090082672). The measurements at the Korean Basic Science Institute (KBSI) are gratefully acknowledged.",

year = "2012",

month = sep,

doi = "10.1016/j.materresbull.2012.05.029",

language = "English",

volume = "47",

pages = "2403--2406",

journal = "Materials Research Bulletin",

issn = "0025-5408",

publisher = "Elsevier Ltd",

number = "9",

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TY - JOUR

T1 - Modification of the optical properties of ZnO thin films by proton implantation

AU - Ham, Yong Ju

AU - Park, Jun Kue

AU - Lee, W.

AU - Lee, Cheol Eui

AU - Park, W.

N1 - Funding Information: This work was supported by the National Research Foundation of Korea (NRL Program 2011-0018628, no. 20100-029418 , and Project no. 20090082672). The measurements at the Korean Basic Science Institute (KBSI) are gratefully acknowledged.

PY - 2012/9

Y1 - 2012/9

N2 - Optical properties of proton-implanted ZnO thin film prepared by radio-frequency (rf) magneton sputtering have been studied, the optical constants being obtained from the reflectance measurements by employing Cauchy-Urbach model. Increase in the ordinary refractive index after proton implantation was explained by that in the polarizability. Besides, a slight increase in the optical band gap by proton implantation was identified and discussed in terms of the hydrogen shallow donors introduced by the proton implantation.

AB - Optical properties of proton-implanted ZnO thin film prepared by radio-frequency (rf) magneton sputtering have been studied, the optical constants being obtained from the reflectance measurements by employing Cauchy-Urbach model. Increase in the ordinary refractive index after proton implantation was explained by that in the polarizability. Besides, a slight increase in the optical band gap by proton implantation was identified and discussed in terms of the hydrogen shallow donors introduced by the proton implantation.

KW - A. ZnO film

KW - B. Proton implantation

KW - D. Optical properties

UR - https://www.scopus.com/pages/publications/84864631862

U2 - 10.1016/j.materresbull.2012.05.029

DO - 10.1016/j.materresbull.2012.05.029

M3 - Article

AN - SCOPUS:84864631862

SN - 0025-5408

VL - 47

SP - 2403

EP - 2406

JO - Materials Research Bulletin

JF - Materials Research Bulletin

IS - 9

ER -

Modification of the optical properties of ZnO thin films by proton implantation

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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