Molecular dynamics study on size-dependent elastic properties of silicon nanocantilevers

S. H. Park; J. S. Kim; J. H. Park; J. S. Lee; Y. K. Choi; O. M. Kwon

doi:10.1016/j.tsf.2005.06.056

Molecular dynamics study on size-dependent elastic properties of silicon nanocantilevers

S. H. Park, J. S. Kim, J. H. Park, J. S. Lee, Y. K. Choi, O. M. Kwon

School of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

94 Citations (Scopus)

Abstract

The motion of nanoscale structures made of pure crystalline silicon with different lattice conditions is simulated in vacuum by applying the molecular dynamics technique with the use of the Tersoff potential. Elastic moduli for various sized specimens are obtained by simulating flexural and longitudinal vibrations as well as simple tension tests. Compared with the bulk silicon, the elastic modulus decreases monotonically by as much as 40% as the thickness of the specimen decreases, and the presence of voids in the specimen further decreases the modulus by a significant amount. Estimation of thermal fluctuations and feasibility study of nanoscale cantilevers as molecular mass sensors demonstrate that the continuum-theory-based analysis can still be used on nanoscale structures provided the dependence of the elastic constants on dimensional scaling is accounted for.

Original language	English
Pages (from-to)	285-289
Number of pages	5
Journal	Thin Solid Films
Volume	492
Issue number	1-2
DOIs	https://doi.org/10.1016/j.tsf.2005.06.056
Publication status	Published - 2005 Dec 1

Keywords

Elastic properties
Nanostructures
Sensors
Silicon

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2005.06.056

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abstract = "The motion of nanoscale structures made of pure crystalline silicon with different lattice conditions is simulated in vacuum by applying the molecular dynamics technique with the use of the Tersoff potential. Elastic moduli for various sized specimens are obtained by simulating flexural and longitudinal vibrations as well as simple tension tests. Compared with the bulk silicon, the elastic modulus decreases monotonically by as much as 40% as the thickness of the specimen decreases, and the presence of voids in the specimen further decreases the modulus by a significant amount. Estimation of thermal fluctuations and feasibility study of nanoscale cantilevers as molecular mass sensors demonstrate that the continuum-theory-based analysis can still be used on nanoscale structures provided the dependence of the elastic constants on dimensional scaling is accounted for.",

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AU - Kim, J. S.

AU - Park, J. H.

AU - Lee, J. S.

AU - Choi, Y. K.

AU - Kwon, O. M.

PY - 2005/12/1

Y1 - 2005/12/1

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AB - The motion of nanoscale structures made of pure crystalline silicon with different lattice conditions is simulated in vacuum by applying the molecular dynamics technique with the use of the Tersoff potential. Elastic moduli for various sized specimens are obtained by simulating flexural and longitudinal vibrations as well as simple tension tests. Compared with the bulk silicon, the elastic modulus decreases monotonically by as much as 40% as the thickness of the specimen decreases, and the presence of voids in the specimen further decreases the modulus by a significant amount. Estimation of thermal fluctuations and feasibility study of nanoscale cantilevers as molecular mass sensors demonstrate that the continuum-theory-based analysis can still be used on nanoscale structures provided the dependence of the elastic constants on dimensional scaling is accounted for.

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KW - Nanostructures

KW - Sensors

KW - Silicon

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Molecular dynamics study on size-dependent elastic properties of silicon nanocantilevers

Abstract

Keywords

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